Publications

221 results at Microelectronic Engineering

Liquid film enhanced laser cleaning
- - W. Zapka
  - A.C. Tam
  - et al.
- 1992
- Microelectronic Engineering
Understanding high numerical aperture optical lithography
- - D. Flagello
  - Alan E. Rosenbluth
  - et al.
- 1992
- Microelectronic Engineering
Positive mode silylation process characterization
- - D.C. La Tulipe
  - A.T.S. Pomerene
  - et al.
- 1992
- Microelectronic Engineering
SiCGe ternary alloys - extending Si-based heterostructures
- - Subramanian S. Iyer
  - K. Eberl
  - et al.
- 1992
- Microelectronic Engineering
Definition and measurement rule for voltage resolution of contactless testing systems based on electron-beam or photoemission methods
- - R. Clauberg
  - R. Lackmann
- 1992
- Microelectronic Engineering
Annealing behavior of gold absorber in x-ray masks
- - R.E. Acosta
  - W.A. Johnson
  - et al.
- 1992
- Microelectronic Engineering
Shallow junctions, silicide requirements and process technologies for sub 0.5 μm CMOS. Invited review paper
- - Bijan Davari
- 1992
- Microelectronic Engineering
Strain relaxation in GeSi layers with uniform and graded composition
- - S.C. Jain
  - P. Balk
  - et al.
- 1991
- Microelectronic Engineering
Conducting polyaniline: Removable SEM discharge layer
- - Marie Angelopoulos
  - Jane M. Shaw
  - et al.
- 1991
- Microelectronic Engineering
The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- - U. Behringer
  - W. Haug
  - et al.
- 1991
- Microelectronic Engineering