Publications

221 results at Microelectronic Engineering

Improved underlayers for acid amplified resists
- - H.S. Sachdev
  - R.W. Kwong
  - et al.
- 1994
- Microelectronic Engineering
Fabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography
- - R. Viswanathan
  - David Seeger
  - et al.
- 1994
- Microelectronic Engineering
Laser stimulated photocathode electron beam prober for 15ps resolution waveform measurements
- - Albert J. Fixl
  - Keith A. Jenkins
- 1994
- Microelectronic Engineering
Lateral down-scaling of selective area MOVPE-grown GaInAs/InP wires and dots
- - H. Rothuizen
  - P. Roentgen
  - et al.
- 1993
- Microelectronic Engineering
Carbon impurities at a Si-SiO₂ interface
- - S.I. Raider
- 1993
- Microelectronic Engineering
Fabrication and characterization of compact 100nm scale metal oxide semiconductor field effect transistors
- - C. Reeves
  - S.J. Wind
  - et al.
- 1993
- Microelectronic Engineering
Reactive ion etching of InAlAs with Ar/Cl₂ mixtures for ridge waveguide lasers
- - R. Germann
  - S. Hausser
  - et al.
- 1993
- Microelectronic Engineering
Hot-electron dynamics in SiO₂ and the degradation of the Si/SiO₂-interface
- - E. Cartier
  - D.J. DiMaria
- 1993
- Microelectronic Engineering
Arrayed miniature electron beam columns
- - T.H.P. Chang
  - L.P. Muray
  - et al.
- 1993
- Microelectronic Engineering
Measurement of the effective wavelength of x-ray lithography sources
- - Juan R. Maldonado
  - Inna Babich
  - et al.
- 1993
- Microelectronic Engineering