XY table and tilting stage for scanning electron microscope (SEM)

Oliver C. Wells

doi:10.1063/1.1134018

Review of Scientific Instruments

Paper

02 Sep 2008

XY table and tilting stage for scanning electron microscope (SEM)

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Abstract

This paper describes a low-vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.

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An irradiation effect in thermally grown SiO₂

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Applied Physics Letters

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The early history and future of the SEM

Oliver C. Wells, David C. Joy

Surface and Interface Analysis

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Application of the low-loss scanning electron microscope image to integrated circuit technology part II - Chemically-mechanically planarized samples

Oliver C. Wells, Maurice McGlashan-Powell, et al.

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Applications of image diagnostics to metrology quality assurance and process control

John A. Allgair, Victor V. Boksha, et al.

SPIE Advanced Microelectronic Manufacturing 2003

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Abstract

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An irradiation effect in thermally grown SiO2

The early history and future of the SEM

Application of the low-loss scanning electron microscope image to integrated circuit technology part II - Chemically-mechanically planarized samples

Applications of image diagnostics to metrology quality assurance and process control

An irradiation effect in thermally grown SiO₂