Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In heteroepitaxy, misfit strain can lead to a variety of fascinating phenomena during growth. These include self-organization of regular arrays of islands (&quantum dots&), of step bunches (which may serve as a template for growth of &quantum wires&), and of compositionally modulated layers (&quantum wells&). Some recent theoretical treatments of these phenomena are described. © 1998 Elsevier Science B.V. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
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IEEE J-STARS
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008