Applied Spectroscopy Reviews

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05 Dec 2006

Plasma Sources in Analytical Mass Spectrometry

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Abstract

No abstract available.

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The role of energetic ion bombardment in silicon-fluorine chemistry

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Nuclear Inst. and Methods in Physics Research, B

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Ion-induced volatilization (IIV): A method for quantitative measurement of the amounts of perfluoropolyether lubricant on a particulate disk surface and in the media porosity

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Ion-surface interactions in plasma etching

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