Physical and chemical mechanisms in the ion-enhanced etching of silicon

K.A. Chao

Physical Review B

G. Will, N. Masciocchi, et al.

Zeitschrift fur Kristallographie - New Crystal Structures

Oliver Schilter, Alain Vaucher, et al.

Digital Discovery

I. Morgenstern, K.A. Müller, et al.

Physica B: Physics of Condensed Matter