Conference paper
LC phase-gratings for reflective spatial light modulators
M. Lu, K.H. Yang
EURODISPLAY 1997
A mirror structure for reflective Si-based light valves was fabricated using chemical-mechanical polishing and a thin 150-nm Al(Cu)/Ti mirror to minimize hillock formation. The use of chemical-mechanical polishing planarization resulted in only a 1% loss in reflectivity from topography under the mirrors. The reflectivity for pixel sizes from 7.5 to 40 μm and 0.7- or 0.5-μm gaps were measured, and the performance of TN LC pixels with different sizes and inversion methods are reported.
M. Lu, K.H. Yang
EURODISPLAY 1997
J.A. Kash, P. Pepeljugoski, et al.
SPIE OPTO 2009
F.E. Doany, C.L. Schow, et al.
LEOS 2007
E.G. Colgan, K.P. Rodbell, et al.
MRS Proceedings 1993