Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In this study, living free radical procedures are extended to reactive monomers such as maleic anhydride, by the use of a mixture of α-hydrido alkoxyamine, and nitroxide. In copolymerizations with styrene, the living nature of the polymerization is preserved, which leads to preferential consumption of functionalized block copolymers, whose molecular weights can be readily controlled up to 100000 while retaining low polydispersities.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
M. Hargrove, S.W. Crowder, et al.
IEDM 1998