ReviewEffects of collector take‐off angle and energy filtering on the BSE image in the SEMOliver C. WellsScanning
PaperApplication of the low-loss scanning electron microscope image to integrated circuit technology part II - Chemically-mechanically planarized samplesOliver C. Wells, Maurice McGlashan-Powell, et al.Scanning
PaperUse of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscopeOliver C. Wells, L. Gignac, et al.Scanning
