Formation of gas-phase silyl radicals in the atomic hydrogen etching of silicon

Joseph M. Jasinski

doi:10.1016/0009-2614(93)80144-E

Chemical Physics Letters

Paper

27 Aug 1993

Formation of gas-phase silyl radicals in the atomic hydrogen etching of silicon

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Abstract

Mass spectrometric evidence is presented for the direct formation of gas-phase silyl radical, SiH3, as a product of the heterogeneous etching reaction of silicon films with hydrogen or deuterium atoms. © 1993.

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A [1,5] sigmatropic hydrogen shift induced by high vibrational overtone excitation: The isomerization of 2-methylcyclopentadiene

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Journal of Physical Chemistry

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Fourth overtone spectra of OH oscillators in simple alcohols

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Silicon Chemical Vapor Deposition One Step at a Time: Fundamental Studies of Silicon Hydride Chemistry

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High vibrational overtone photochemistry of cyclobutene

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