Huiling Shang, Martin M. Frank, et al.
IBM J. Res. Dev
We report absolute removal rate constants for silylene by reaction with alkanes, olefins, 1,3-butadiene, and acetylene at ambient temperature and 5-Torr total pressure. Rate constants were determined by laser resonance absorption flash kinetic spectroscopy. The results show that silylene is unreactive with alkanes and reacts rapidly and unselectively with unsaturated hydrocarbons. © 1987 American Chemical Society.
Huiling Shang, Martin M. Frank, et al.
IBM J. Res. Dev
Steven J. Koester, Jeremy D. Schaub, et al.
IEEE Journal on Selected Topics in Quantum Electronics
John Kouvetakis, David B. Beach
Chemistry of Materials
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IEEE Transactions on Electron Devices