Joseph M. Jasinski
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
We report absolute removal rate constants for silylene by reaction with alkanes, olefins, 1,3-butadiene, and acetylene at ambient temperature and 5-Torr total pressure. Rate constants were determined by laser resonance absorption flash kinetic spectroscopy. The results show that silylene is unreactive with alkanes and reacts rapidly and unselectively with unsaturated hydrocarbons. © 1987 American Chemical Society.
Joseph M. Jasinski
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Lijuan Huang, Jack O. Chu, et al.
IEEE Transactions on Electron Devices
Wu Lu, Steven J. Koester, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Joseph M. Jasinski, Stephen M. Gates
Accounts of Chemical Research