Excimer laser projection lithography

W. Imaino, R.T. Kerth, et al.

Proceedings of SPIE 1989

K. Jain, S. Rice, et al.

Polymer Engineering & Science

G.C. Bjorklund, K. Jain, et al.

Applied Physics Letters

K. Jain, G.H. Hewig

Optics Communications