Conference paper
Effect of track crossing on focus servo signals: Feedthrough
M.R. Latta, T.C. Strand, et al.
SPIE Optical Data Storage Topical Meeting 1992
Paper
Excimer laser projection photoetching
Abstract
Direct photoetching of various resists and polymers with a 193-nm ArF excimer laser has been demonstrated by imaging a mask through a projection lens. Feature sizes ranging from 2 to 20 μm have been cleanly etched in 1-μm-thick films.
Related
M.R. Latta, R.V. Pole
Applied Optics
K. Jain, S. Rice, et al.
Polymer Engineering & Science
W.J. Kozlovsky, A.G. Dewey, et al.
SPIE Optical Data Storage Topical Meeting 1992