T.J. De Lyon, J. Woodall, et al.
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Metal stoichiometry in superconducting bulk materials and thin films made of LaSrCu-oxides, YBaCu-oxides, and BiCaSrCu-oxides were determined by inductively coupled plasma atomic-emission spectrometry (ICP-AES) after dissolution in a 1 mixture of 20% v/v hydrochloric and nitric acids. The method provides reliable results, with which a variety of manufacturing processes can be optimized. The precision of the metal determinations ranges from 3 to 9%. © 1987.
T.J. De Lyon, J. Woodall, et al.
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
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