Publications

745 results at IBM J. Res. Dev

Low-temperature Si and Si:Ge epitaxy by ultrahigh-vacuum/chemical vapor deposition. Process fundamentals
- - B.S. Meyerson
- 1990
- IBM J. Res. Dev
Simulation of embedded memories by defective hashing
- - Leendert M. Huisman
- 1990
- IBM J. Res. Dev
On-chip wiring for VLSI. Status and directions
- - M.B. Small
  - D.J. Pearson
- 1990
- IBM J. Res. Dev
Surface chemistry of the WF₆-based chemical vapor deposition of tungsten
- - M.L. Yu
  - K.Y. Ahn
  - et al.
- 1990
- IBM J. Res. Dev
Internal probing of submicron FETs and photoemission using individual oxide traps
- - P. Restle
  - Antonio Gnudi
- 1990
- IBM J. Res. Dev
Magnetic thin films in recording technology
- - V.S. Speriosu
  - D.A. Herman Jr.
  - et al.
- 1990
- IBM J. Res. Dev
Design of low-temperature thermal chemical vapor deposition processes
- - D.B. Beach
- 1990
- IBM J. Res. Dev
Surface and interfacial energies of CoSi₂ and Si films. Implications regarding formation of three-dimensional silicon-silicide structures
- - K.N. Tu
- 1990
- IBM J. Res. Dev
Diamondlike carbon films by rf plasma-assisted chemical vapor deposition from acetylene
- - A. Grill
  - B.S. Meyerson
  - et al.
- 1990
- IBM J. Res. Dev
Picosecond photoemission probing of integrated circuits. Capabilities, limitations, and applications
- - R. Clauberg
  - H. Beha
  - et al.
- 1990
- IBM J. Res. Dev