The application of deep UV phase shifted-single layer halftone reticles to 256 mbit dynamic random access memory cell patterns
- Kohji Hashimoto
- Donald J. Samuels
- et al.
- 1994
- Japanese Journal of Applied Physics
Publications
129 results at Japanese Journal of Applied Physics
Characterization and application of materials grown by electron-beam-induced deposition
- Hans W. P. Koops
- Johannes Kretz
- et al.
- 1994
- Japanese Journal of Applied Physics
Optical recording at 2.4 gbit/in2 using a frequency doubled diode laser
- J.E. Hurst
- W.J. Kozlovsky
- 1993
- Japanese Journal of Applied Physics
Reactive ion etching of sputter deposited tantalum with Cf4, Cf3Cl, and CHF3
- Yue Kuo
- 1993
- Japanese Journal of Applied Physics
Limits and possibilities of miniaturization
- H. Rohrer
- 1993
- Japanese Journal of Applied Physics
Metalorganic molecular beam epitaxy of algaas using apah
- Frank Konig
- Georg Morsch
- et al.
- 1993
- Japanese Journal of Applied Physics
Plasma swelling of photoresist
- Yue Kuo
- 1993
- Japanese Journal of Applied Physics
Model-following digital servo using multirate sampling for an optical disk drive
- Tetsuo Semba1
- 1993
- Japanese Journal of Applied Physics
Vector Diffraction Modeling: Polarization Dependence of Optical Readout/servo signals
- Kiyoshi Kobayashi
- 1993
- Japanese Journal of Applied Physics
Frame sequential color thin film transistor/liquid crystal displays: Display characteristics and grayscale consideration
- Hiap Liew Ong
- 1993
- Japanese Journal of Applied Physics