Investigation of island formation during through-mask electrochemical micromachining
- R.V. Shenoy
- M. Datta
- et al.
- 1996
- JES
Publications
509 results at JES
Electromigration drift velocity in Al-alloy and Cu-alloy lines
- C.-K. Hu
- K.Y. Lee
- et al.
- 1996
- JES
Nonphotosensitive, vertically redundant two-channel a-Si:H thin film transistor
- Yue Kuo
- 1996
- JES
Etching of tantalum in fluorine-containing high density plasmas
- R. Hsiao
- D.C. Miller
- 1996
- JES
Horizontally redundant, split-gate a-Si:H thin film transistors
- Yue Kuo
- 1996
- JES
Alloying of a Less Noble Metal in Electrodeposited Cu Through Underpotential Deposition
- Hariklia Deligianni
- I-Chia Hsu Chang
- et al.
- 1995
- JES
Fabrication of an array of precision nozzles by through-mask electrochemical micromachining
- Madhav Datta
- 1995
- JES
Laser-Assisted Seeding for Electroless Plating on Polyimide Surfaces
- A.G. Schrott
- Bodil Braren
- et al.
- 1995
- JES
PECVD Silicon Nitride as a Gate Dielectric for Amorphous Silicon Thin Film Transistor Process and Device Performance
- Yue Kuo
- 1995
- JES
Low Temperature Atmospheric Pressure Chemical Vapor Deposition for Epitaxial Growth of SiGe Bipolar Transistors
- D.A. Grutzmacher
- D.A. Grutzmacher
- 1995
- JES