Publications

221 results at Microelectronic Engineering

Strain relaxation in GeSi layers with uniform and graded composition
- - S.C. Jain
  - P. Balk
  - et al.
- 1991
- Microelectronic Engineering
Light scattering properties of x-ray lithography mask substrates
- - J.R. Maldonado
  - Y. Vladimirsky
  - et al.
- 1991
- Microelectronic Engineering
GaAs opto-electronic integrated circuits for high speed optical communications
- - D.L. Rogers
- 1991
- Microelectronic Engineering
X-ray mask distortion due to radiation damage
- - R.E. Acosta
- 1991
- Microelectronic Engineering
MOVPE on patterned substrates: a new fabrication method for nanometer structure devices
- - Yvan D. Galeuchet
  - Hugo Rothuizen
  - et al.
- 1991
- Microelectronic Engineering
The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- - U. Behringer
  - W. Haug
  - et al.
- 1991
- Microelectronic Engineering
Fabrication of sub-100nm dual-gate MODFETS with enhanced performance
- - K.Y. Lee
  - K. Ismail
  - et al.
- 1991
- Microelectronic Engineering
Metrology using differential phase contrast microscopy
- - Jerry C. Shaw
- 1991
- Microelectronic Engineering
Acid hardenable, spin-coatable silicon ladder polymer systems as resist materials
- - Hiroyuki Hiraoka
  - Tsuguo Yamaoka
- 1991
- Microelectronic Engineering
Electron beam tester measurements of switching noise in VLSI circuits
- - Keith A. Jenkins
  - David F. Heidel
- 1991
- Microelectronic Engineering