Publications

221 results at Microelectronic Engineering

Electron-beam microcolumn fabrication and testing
- - M. Despont
  - U. Staufer
  - et al.
- 1996
- Microelectronic Engineering
Scaling silicon MOS devices to their limits
- - S.J. Wind
  - D.J. Frank
  - et al.
- 1996
- Microelectronic Engineering
Anomalous positive charge formation by atomic hydrogen exposure
- - R.E. Stahlbush
  - E. Cartier
  - et al.
- 1995
- Microelectronic Engineering
Enhanced e-beam system for the fabrication of optical elements
- - D. Prongue ́
  - H. Rothuizen
  - et al.
- 1995
- Microelectronic Engineering
Kinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- - G.M. Wallraff
  - John M. Hutchinson
  - et al.
- 1995
- Microelectronic Engineering
Doping profiling with scanning surface harmonic microscopy
- - M. Johnson
  - J.P. Bourgoin
  - et al.
- 1995
- Microelectronic Engineering
Atomic-scale analysis of quantum nanostructures with the STM
- - M. Johnson
  - M. Pfister
  - et al.
- 1995
- Microelectronic Engineering
Fabrication of Aharonov-Bohm rings in Si/SiGe heterostructure
- - K.Y. Lee
  - K. Ismail
  - et al.
- 1995
- Microelectronic Engineering
Stress induced leakage currents in thin oxides
- - D.J. DiMaria
- 1995
- Microelectronic Engineering
Determination of Helium presence in the mask/wafer gap of X-ray lithography steppers
- - Juan R. Maldonado
  - Ron DellaGuardia
  - et al.
- 1995
- Microelectronic Engineering