Secondary electron imaging by means of a microfabricated electron column
- C. Stebler
- M. Despont
- et al.
- 1996
- Journal de Physique III
Publications
113 results for Michel Despont
Local electrochemical oxidation/reduction: First step towards a new lithography?
- Jean-Pierre Locquet
- Frédéric Arrouy
- et al.
- 1995
- Applied Physics Letters
Microfabrication of lenses of a miniaturized electron column
- M. Despont
- U. Staufer
- et al.
- 1995
- Microelectronic Engineering