Film modification by low energy ion bombardment during deposition
- S.M. Rossnagel
- J.J. Cuomo
- 1989
- Thin Solid Films
Publications
97 results for Stephen Rossnagel
Optical emission in magnetrons: Nonlinear aspects
- S.M. Rossnagel
- K.L. Saenger
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gas density reduction effects in magnetrons
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of the surface oxidation and magnetic properties of MnFe thin films
- S.L. Cohen
- Michael A. Russak
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Magnetron plasma diagnostics and processing implications
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Current-voltage relations in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Deposition and redeposition in magnetrons
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ion beam bombardment effects during films deposition
- SM Rossnagel
- JJ Cuomo
- 1988
- Vacuum
PLASMA EFFECTS ON FILM PROPERTIES OF MAGNETRON SPUTTERED CARBON FILMS.
- Michael A. Russak
- S.M. Rossnagel
- 1986
- Symposium on Plasma Processing 1986
Charge transport in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films