Low temperature formation of C54-TiSi2 using titanium alloys
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1997
- Applied Physics Letters
Publications
201 results for Christian Lavoie
Surface roughening during titanium silicide formation: A comparison between Si(100) and poly-Si substrates
- C. Lavoie
- R. Martel
- et al.
- 1996
- MRS Fall Meeting 1996
Phase formation sequences in the silicon-phosphorus system: Determined by in-situ synchrotron and conventional X-ray diffraction measurements and predicted by a theoretical model
- J.R.A. Carlsson
- L. Clevenger
- et al.
- 1997
- Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
Crystallographic texture of C54 titanium disilicide as a function of deep submicron structure geometry
- V. Svilan
- K.P. Rodbell
- et al.
- 1997
- Journal of Electronic Materials
In situ detection of misfit dislocations by light scattering
- K.L. Kavanagh
- R.S. Goldman
- et al.
- 1997
- Journal of Crystal Growth
Effect of growth conditions on surface roughening of relaxed InGaAs on GaAs
- T. Pinnington
- C. Lavoie
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
In situ TEM analysis of TiSi2 C49-C54 transformations during annealing
- L. Gignac
- V. Svilan
- et al.
- 1996
- MRS Fall Meeting 1996
Formation of a crystalline metal-rich suicide in thin film titanium/silicon reactions
- L. Clevenger
- C. Cabral Jr.
- et al.
- 1996
- Thin Solid Films
Dependence of crystallographic texture of C54 TiSi2 on thickness and linewidth in submicron CMOS structures
- V. Svilan
- K.P. Rodbell
- et al.
- 1996
- MRS Spring Meeting 1996
In situ analysis of the formation of thin TiSi2 (<50 nm) contacts in submicron CMOS structures during rapid thermal annealing
- L. Clevenger
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995