Publications

4 results for T. Rajagopalan

Supercritical CO₂ extraction of porogen phase: An alternative route to nanoporous dielectrics
- - J.A. Lubguban
  - S. Gangopadhyay
  - et al.
- 2004
- Journal of Materials Research
Supercritical CO₂ treatments for semiconductor applications
- - S. Gangopadhyay
  - J.A. Lubguban
  - et al.
- 2004
- MRS Proceedings 2004
Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
- - T. Rajagopalan
  - B. Lahlouh
  - et al.
- 2003
- Applied Physics Letters
Creating nanoporosity by selective extraction of porogens using supercritical carbon dioxide/cosolvent processes
- - B. Lahlouh
  - T. Rajagopalan
  - et al.
- 2003
- MRS Proceedings 2003