Publications

7 results for B. Mendoza

Study of TiN and TaN underlayer properties and their influence on W growth
- - Shanti Pancharatnam
  - Gabriel Rodriguez
  - et al.
- 2019
- IEEE Trans Semicond Manuf
High-throughput, nondestructive assessment of defects in patterned epitaxial films on silicon by machine learning-enabled broadband plasma optical measurements
- - Shravan Matham
  - C. Durfee
  - et al.
- 2019
- ASMC 2019
Study of titanium nitride underlayer properties and its influence on tungsten growth
- - Shanti Pancharatnam
  - J. Wynne
  - et al.
- 2018
- ASMC 2018
Development of TiO₂ containing hardmasks through plasma-enhanced atomic layer deposition
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2017
- J. Micro/Nanolithogr. MEMS MOEMS
Development of TiO₂ containing hardmasks through PEALD deposition
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Study of alternate hardmasks for extreme ultraviolet patterning
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2016
- JVSTB
Advanced in-line metrology strategy for self-aligned quadruple patterning
- - Robin Chao
  - Mary Breton
  - et al.
- 2016
- SPIE Advanced Lithography 2016