Zn⁺ implanted silicon waveguide photodiodes for on-chip mid-infrared detection

We present the first experimental demonstration of Zn+ implanted Si waveguide photodiodes for 2.2-2.4 μm operation. Preliminary responsivities > 65 mA/W are measured, suggesting suitability for on-chip sensing and communications applications in the mid-infrared. © 2014 OSA.