Nicolas Loubet, T. Devarajan, et al.
IEDM 2019
We detail the use of ring oscillators (ROs) for yield learning during the research phase of a CMOS technology generation. Failing circuits are located and classified based on electrical analysis of ROs and FETs (Field Effect Transistor) wired out from RO environments. Based on electrical data and binning methods, we improve detection and classification fault methodologies and form a yield detractor pareto. Inline defect monitoring can help to estimate RO yield and is essential in CMOS technology research.
Nicolas Loubet, T. Devarajan, et al.
IEDM 2019
Victor Chan, I. Ok, et al.
ASMC 2023
Victor Chan, Ken Rim, et al.
CICC 2005
Victor Chan, A. Gasasira, et al.
ASMC 2022