Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Silicon technology development is at a crossroads, following an exponential rate of progress for more than thirty years. While CMOS (complementary metal-oxidesemiconductor) will remain the backbone of digital logic, silicon technology will evolve in directions driven by system needs that are not met by CMOS alone. It is argued that BiCMOS (bipolar complementary metaloxide-semiconductor), particularly SOI (silicon-on-Insulator) BiCMOS, will emerge as an important technology platform for mixed-signal systems. The bipolar transistors will be used primarily for the rf (radio-frequency) and analog functions, while the CMOS will be used for most digital functions. The SOI substrate provides dc and ac isolation, as well as opportunities for further device and circuit innovation.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Yvonne Anne Pignolet, Stefan Schmid, et al.
Discrete Mathematics and Theoretical Computer Science
Rafae Bhatti, Elisa Bertino, et al.
Communications of the ACM
Preeti Malakar, Thomas George, et al.
SC 2012