Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
An approach for the calculation of linear, orthogonal transforms that allowed efficient implementations on a range of target architectures was shown. The method allowed for avoidance of multiplies, dynamic precision control and flexible, integer-based implementation. The result showed that low-cost, off-the-shelf processors may be used in systems requiring high throughput for signal processing applications.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Michael E. Henderson
International Journal of Bifurcation and Chaos in Applied Sciences and Engineering
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996