W.H. Teh, U. Dürig, et al.
Journal of Applied Physics
A scheme is described that resolves the problem of coupling sensitive equipment to a heat exchanger while retaining excellent isolation against vibrations in an ultrahigh vacuum environment.
W.H. Teh, U. Dürig, et al.
Journal of Applied Physics
G. Cross, A. Schirmeisen, et al.
Physical Review Letters
M. Despont, J. Brugger, et al.
Sensors and Actuators, A: Physical
A. Stalder, U. Dürig
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures