Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Transport anisotropy was studied by conduction electron spin resonance (CESR) in lithium intercalated graphite between 300 K and 4 K. Parallel to the graphitic c-axis, the carriers cease diffusing between room temperature and 100 K on a time scale of μsec in the first-stage C6Li compound, but become more mobile in the second-stage compound. The transition to a low diffusion state in the c-direction for C6Li suggests a 3D to near 2D metal crossover, whereas the second-stage compound is always 3D. © 1985.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME