Conference paper
Acid-catalyzed deprotection and rearrangement in resist design
Hiroshi Ito, Mitsuru Ueda, et al.
ACS PMSE 1989
A report is presented on the thermal decomposition behavior of several polymethacrylates and the effect of the ester structure on the thermolysis in correlation with the photosensitivity in acid-catalyzed thermolysis. Differential scanning calorimetry (DSC) curves of the polymethacrylates and presented together with that of PMAA Polymethacrylic Acid PMAA loses absorbed water below 140°C (1st heating), and then dehydrates to form PMAN, at the temperature ranging from 180 to 260°C.
Hiroshi Ito, Mitsuru Ueda, et al.
ACS PMSE 1989
Hiroshi Ito, G. Breyta, et al.
Microlithography 1995
R.D. Allen, Hiroshi Ito, et al.
ACS Spring 1999
Hiroshi Ito, Arno Knebelkamp, et al.
ACS PMSE 1992