Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
No abstract available.
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
Tong Zhang, G.H. Golub, et al.
Linear Algebra and Its Applications
Paul J. Steinhardt, P. Chaudhari
Journal of Computational Physics