Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
By means of the Doppler-Shift-Laser-Fluorescence technique we have measured the effect of oxygen coverage on the velocity distributions and relative yields of sputtered Ba atoms and ions in both the ground and metastable excited states. Our measurements show no evidence that the excitation probabilities are correlated with the magnitude of the electric-dipole-moment matrix element to the ground state. We also find that the excitation probability of the Ba(1 D) state from a clean metal surface depends strongly on the emission velocity υ and approaches the functional form exp( -A av) at higher velocities. © 1983.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Revanth Kodoru, Atanu Saha, et al.
arXiv