Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
No abstract available.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Hiroshi Ito, Reinhold Schwalm
JES
J.H. Stathis, R. Bolam, et al.
INFOS 2005
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983