Conference paper
Hot electron emission lithography
M. Poppeller, E. Cartier, et al.
Microlithography 1999
M. Poppeller, E. Cartier, et al.
Microlithography 1999
F.K. LeGoues, P.M. Mooney, et al.
Physical Review Letters
R.M. Tromp, A.W. Denier Van Der Gon, et al.
Physical Review Letters
F.K. LeGoues, V.P. Kesan, et al.
Physical Review Letters