Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
A numerical algorithm for solving stiff boundary value problems with turning points is presented. The stiff systems are characterized as singularly perturbed differential equations. The numerical method is derived by appropriately discretizing the boundary layer and connection theory for such systems. Numerical results demonstrate the effectiveness of the method. In many cases the calculation proceeds with mesh increments which are orders of magnitude larger than those used by other known methods. © 1974, American Mathematical Society.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
A.R. Gourlay, G. Kaye, et al.
Proceedings of SPIE 1989
Kenneth L. Clarkson, K. Georg Hampel, et al.
VTC Spring 2007
R.A. Brualdi, A.J. Hoffman
Linear Algebra and Its Applications