Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
A selective solvent induced surface reconstruction of thin films of an asymmetric diblock copolymer of poly(styrene-b-methyl methacrylate) was investigated by grazing incidence small-angle X-ray scattering, X-ray reflectivity, and atomic force microscopy. It is quantitatively shown that the selective swelling of the minor component results in the formation of a nanoporous film where the initial hexagonal array of the copolymer is preserved without affecting the lattice constant, 40.7 nm. However, the film thickness increased by ∼17%, and the average electron density decreased by ∼20%. The electron density profiles obtained by fitting the X-ray reflectivity indicate that the pores penetrate through the entire film and that the pores are oriented normal to the surface.
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B