Peter J. Price
Surface Science
A selective solvent induced surface reconstruction of thin films of an asymmetric diblock copolymer of poly(styrene-b-methyl methacrylate) was investigated by grazing incidence small-angle X-ray scattering, X-ray reflectivity, and atomic force microscopy. It is quantitatively shown that the selective swelling of the minor component results in the formation of a nanoporous film where the initial hexagonal array of the copolymer is preserved without affecting the lattice constant, 40.7 nm. However, the film thickness increased by ∼17%, and the average electron density decreased by ∼20%. The electron density profiles obtained by fitting the X-ray reflectivity indicate that the pores penetrate through the entire film and that the pores are oriented normal to the surface.
Peter J. Price
Surface Science
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007