Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Paper
Scanning tunneling microscopy
Abstract
Scanning tunneling microscopy, a novel technique based on vacuum tunneling, yields surface topographies in real space and work function profiles on an atomic sale. Surfaces are shown for Au(110), Si(111) and GaAs(111). © 1983.
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