Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In an earlier paper, starting from the phonon Boltzmann equation, expressions were derived which give velocity c and damping of second sound in a Debye solid in terms of mean relaxation times for various scattering processes. Using those results, heat-pulse data showing second sound in NaF were analyzed. The experimental values of c (T) can only be reproduced if {Mathematical expression}, the mean relaxation rate for normal phonon collisions, varies with temperature as T3. The mean Umklapp collision time also shows some unexpected behavior. © 1975 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
A. Reisman, M. Berkenblit, et al.
JES
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011