Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Let S be a set of n closed intervals on the x-axis. A ranking assigns to each interval, s, a distinct rank, p(s)∈ {1, 2,…, n}. We say that s can see t if p(s)<p(t) and there is a point p∉ s∩ t so that p∉u for all u with p(s)<p(u)<p(t). It is shown that a ranking can be found in time O(n log n) such that each interval sees at most three other intervals. It is also shown that a ranking that minimizes the average number of endpoints visible from an interval can be computed in time 0(n5/2). The results have applications to intersection problems for intervals, as well as to channel routing problems which arise in layouts of VLSI circuits. © 1990, Taylor & Francis Group, LLC. All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
John R. Kender, Rick Kjeldsen
IEEE Transactions on Pattern Analysis and Machine Intelligence
Imran Nasim, Michael E. Henderson
Mathematics
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007