Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
Paper
Pressure and plasma effects on the properties of magnetron sputtered carbon films
Abstract
No abstract available.
Related
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
P.C. Pattnaik, D.M. Newns
Physical Review B
Sung Ho Kim, Oun-Ho Park, et al.
Small