William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Thin films of (Pb, La)TiO3 were grown with three new trialkylphosphine oxide adducts of lanthanum tris-tetramethylheptanedione with the general formula La(thd)3(RR′R″3PO)n where thd = tetramethylheptanedione, (CH3)3CCOCHCOC(CH3)3; R = R′ =R″ = CH3; R = R″ = CH3, R″ = C4H9; R = R′ = R″ = C4H9. The new precursors were compared with La(thd)3 and were evaluated for volatility, thermal stability, ease of transport and La incorporation into a (Pb, La)TiO3 film.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A. Reisman, M. Berkenblit, et al.
JES
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta