PaperSupercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectricsJ.A. Lubguban, S. Gangopadhyay, et al.Journal of Materials Research
Conference paperSuccessful dual damascene integration of extreme low k materials (k < 2.0) using a novel gap fill based integration schemeS.V. Nitta, S. Purushothaman, et al.IEDM 2004
PaperSoluble alkyl substituted polygermanes: Thermochromic behaviorR.D. Miller, R. SooriyakumaranJournal of Polymer Science Part A: Polymer Chemistry
PaperPore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scatteringE. Huang, M. Toney, et al.Applied Physics Letters
