C. Smart, B.N. Eldridge, et al.
Chemical Physics Letters
Normalized ionization probabilities α+ are reported for binary Fe-Ni alloys under O+2 bombardment at a 45° incidence angle. It is shown that the dependence of α+ on the composition is much smaller than at normal incidence. Photoemission spectroscopy reveals that both nickel and iron remain essentially metallic under oblique-incidence bombardment, whereas almost complete oxidation occurs at normal incidence. This is attributed to our observation that sputter yields under oxygen bombardment increase much faster than cos α-1.
C. Smart, B.N. Eldridge, et al.
Chemical Physics Letters
R.V. Joshi, V. Prasad, et al.
Journal of Applied Physics
W. Reuter, J.D. Kuptsis, et al.
Journal of Physics D: Applied Physics
T.H.P. Chang, M.G.R. Thomson, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures