Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A number of mixed aromatic/cycloaliphatic as well as fully nonaromatic polyimides have been prepared. Whereas all the poly(amic acids) derived from nonaromatic diamines involved salt-formation during the initial stages of the polymerization, the majority of these eventually formed homogeneous, highly viscous polymer solutions. Only in a few select cases involving all nonaromatic monomers traditional solution polymerization was unsuccessful. The polyimide derived from hexafluoroisopropylidene diphthalic anhydride (6FDA) and trans-1,4-diaminocyclohexane (DACH) yielded films with tough mechanical properties, a glass transition temperature of ∼360°C, good solvent resistance, and a low dielectric constant of 2.6. Thermal stability of this polyimide as determined by thermal gravimetric analysis in both air and nitrogen was quite good, exhibiting a weight loss of only 0.07 wt%/h at 350°C under isothermal conditions in nitrogen. However, mechanical properties as a function of thermal aging in both air and nitrogen indicated a maximum use temperature of only 350°C under inert conditions and less than 300°C in the presence of oxygen.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025