Physisorbed template for spatial patterning of adsorbates

The use of physisorbed species as a template for patterning of adsorbate monolayers at surfaces on the micron scale is demonstrated. A physisorbed monolayer is partially removed by laser-induced thermal desorption and serves as a mask during exposure of the final (chemisorbed) adsorbate species, thus acting in a manner similar to a monolayer photoresist. The effect, which has been demonstrated for H/Xe/Si(111)− 7 × 7, permits clean and precise patterning of monolayers of strongly bound and/or thermally unstable adsorbates. © 1997 American Physical Society.