Conference paper
Sub-halfmicron negative resist systems by image reversal
K. Chiong, H. Hiraoka
Proceedings of SPIE 1989
No abstract available.
K. Chiong, H. Hiraoka
Proceedings of SPIE 1989
J. Krishnaswamy, G.J. Collins, et al.
Proceedings of SPIE 1989
H. Hiraoka
J. Photopolym. Sci. Tech.
H. Hiraoka, J. Pacansky
JES