Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The properties of a very weakly coupled two-dimensional array of 20 000 1-m2Nb Josephson junctions have been studied to 3 mK. Not only are many of the characteristics similar to those of granular films, but new effects, particularly resistance periodicities with magnetic field, provide direct evidence for the increase of two-dimensional phase coherence as the temperature is lowered through the resistive transition. © 1982 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021