Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
In this work, we propose a dual-port cell design to address the pass disturbance in vertical NAND storage, which can pass signals through a dedicated and string-compatible pass gate. We demonstrate that (i) the pass disturb-free feature originates from weakening of the depolarization field by the pass bias at the high-VTH (HVT) state and the screening of the applied field by the channel at the low-VTH (LVT) state; (ii) combined simulations and experimental demonstrations of dual-port design verify the disturb-free operation in a NAND string, overcoming a key challenge in single-port designs; (iii) the proposed design can be incorporated into a highly scaled vertical NAND FeFET string, and the pass gate can be incorporated into the existing three-dimensional (3D) NAND with the negligible overhead of the pass gate interconnection through a global bottom pass gate contact in the substrate.
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Hiroshi Ito, Reinhold Schwalm
JES