Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Decentralized regulation for a string of coupled linear systems is studied. Available to each controller is localized information, represented by linear functions of the state. Necessary conditions for the optimal time-invariant linear regulators are established. The theory can be applied for designing simple on-board computers for regulating a string of moving vehicles. Copyright © 1974 by The Institute of Electrical and Electronics Engineers, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Chi-Leung Wong, Zehra Sura, et al.
I-SPAN 2002
Raymond F. Boyce, Donald D. Chamberlin, et al.
CACM
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ACM/IEEE SC 2006